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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 116, Issue 1-4, 1996, Pages 369-372

Excimer laser induced thermal evaporation and ablation of silicon carbide

(2) Reitano, R a Baeri, P a

a UNIVERSITY OF CATANIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; EVAPORATION; EXCIMER LASERS; HEATING; LASER ABLATION; MATHEMATICAL MODELS; MELTING; MORPHOLOGY; PULSED LASER APPLICATIONS; TEMPERATURE MEASUREMENT; THICKNESS MEASUREMENT;

ABLATION RATES; ABLATION THRESHOLD; LASER FLUENCE; LASER PULSE ENERGY; THERMAL MODEL; THERMAL SPUTTERING;

SILICON CARBIDE;

EID: 0030218249 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/0168-583X(96)00072-9 Document Type: Article

Times cited : (7)

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