Structure of gold-hydrocarbon composite thin films deposited using low-voltage plasma sputtering method

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 390-392

  Okamoto, Akio ^a   Nosaka, Toshikazu ^a   Yoshitake, Masaaki ^a   Suzuki, Yoshihiko ^a   Ogawa, Soichi ^a  

^a OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

Author keywords

Gold; Hydrocarbons; Plasma processing and deposition; Sputtering

Indexed keywords

COMPOSITE MATERIALS; CRYSTAL STRUCTURE; FILM GROWTH; FILM PREPARATION; GOLD; HYDROCARBONS; MIXTURES; PLASMA APPLICATIONS; POLYMERIZATION; POLYMERS; SPUTTER DEPOSITION; SUBSTRATES;

LOW VOLTAGE PLASMA SPUTTERING; PLASMA POLYMERIZATION; PLASMA PROCESSING;

THIN FILMS;

EID: 0030217729     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08699-3     Document Type: Article

References (4)

1. S. Hayashi, J. Vac. Soc. Jpn., 34 (1991) 799.
2. J.P. Segaud, B. Drevillon, E. Pascual, R. Ossikovski, G. Monnier and L. Rimbourg, Thin Solid Films, 234 (1993) 503.
3. H. Sjostrom, L. Hultman, J.-E. Sundgren and L.R. Wallenberg, Thin Solid Films, 252 (1993) 169.
4. M. Haruta, Chemistry, 47 (1992) 456.