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Volumn 116, Issue 1-4, 1996, Pages 410-415
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Temperature dependence of silicon precipitation in thin surface layer of Si3N4 induced by excimer laser irradiation
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
EXCIMER LASERS;
LASER BEAM EFFECTS;
LASER PULSES;
PRECIPITATION (CHEMICAL);
SATURATION (MATERIALS COMPOSITION);
SILICON;
SILICON NITRIDE;
X RAY PHOTOELECTRON SPECTROSCOPY;
EXCIMER LASER IRRADIATION;
LASER FLUENCE;
SILICON PRECIPITATION;
SURFACES;
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EID: 0030217229
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/0168-583X(96)00079-1 Document Type: Article |
Times cited : (1)
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References (7)
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