메뉴 건너뛰기




Volumn 116, Issue 1-4, 1996, Pages 410-415

Temperature dependence of silicon precipitation in thin surface layer of Si3N4 induced by excimer laser irradiation

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; EXCIMER LASERS; LASER BEAM EFFECTS; LASER PULSES; PRECIPITATION (CHEMICAL); SATURATION (MATERIALS COMPOSITION); SILICON; SILICON NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0030217229     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00079-1     Document Type: Article
Times cited : (1)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.