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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 116, Issue 1-4, 1996, Pages 355-359

Radiation effects in vacuum-ultraviolet-irradiated SiNx:H films

(1) Akazawa, Housei a

a NTT CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL MODIFICATION; MOLECULAR STRUCTURE; PHOTOCHEMICAL REACTIONS; SILICON NITRIDE; STRESSES; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

BIAS VOLTAGE; COLLISION CASCADE; SUPRATHERMAL HEATING;

AMORPHOUS FILMS;

EID: 0030217228 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/0168-583X(96)00129-2 Document Type: Article

Times cited : (3)

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