Process-parameter optimization of Sb2O3 films in the ultraviolet and visible region for interferometric applications

Applied Physics A: Materials Science and Processing

Volumn 63, Issue 2, 1996, Pages 195-202

  Sahoo, N K ^a   Apparao, K V S R ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ANTIMONY COMPOUNDS; ENERGY GAP; EVAPORATION; FABRY-PEROT INTERFEROMETERS; INTERFEROMETRY; MULTILAYERS; PRESSURE EFFECTS; REFLECTIVE COATINGS; THERMAL EFFECTS; THIN FILMS;

INTERFERENCE MODULATED TRANSMITTANCE SPECTRA; PROCESS PARAMETER OPTIMIZATION; ULTRAVIOLET REGION; VISIBLE REGION;

DIELECTRIC FILMS;

EID: 0030216979     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050372     Document Type: Article

References (44)