Composition dependence of morphology, structure, and thermoelectric properties of FeSi2 films prepared by sputtering deposition

Journal of Materials Research

Volumn 11, Issue 8, 1996, Pages 2062-2070

  Tsunoda, Tatsuo ^a   Mukaida, Masakazu ^a   Watanabe, Akio ^a   Imai, Yoji ^a  

^a NATL INST OF MAT AND CHEM RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM PREPARATION; HEAT TREATMENT; IRON COMPOUNDS; MORPHOLOGY; PHASE DIAGRAMS; PHASE EQUILIBRIA; SPUTTER DEPOSITION; SUBSTRATES; THERMAL EFFECTS; THERMOELECTRICITY;

SEEBECK COEFFICIENT; THERMOELECTRIC ENERGY CONVERSION;

METALLIC FILMS;

EID: 0030216162     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0259     Document Type: Article

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