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Volumn 19, Issue 9, 1996, Pages
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How to accomplish effective megasonic particle removal
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC STREAMING;
ATTENUATION;
BUBBLES (IN FLUIDS);
EFFICIENCY;
LIGHT EMISSION;
PARTICLES (PARTICULATE MATTER);
REMOVAL;
SEMICONDUCTOR DEVICES;
SONOLUMINESCENCE;
VISCOSITY;
BATH TEMPERATURE;
CAVITATION DETECTION;
DILUTE CHEMISTRY;
MEGASONIC CLEANING;
MEGASONIC POWER;
SONIC ENERGY;
STABLE CAVITATION;
SURFACE CLEANING;
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EID: 0030214502
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (7)
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References (14)
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