Ultrahigh vacuum scanning force microscope with fiber-optic deflection sensor

Review of Scientific Instruments

Volumn 67, Issue 8, 1996, Pages 2957-2959

  Kracke, B ^a   Damaschke, B ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; FEEDBACK CONTROL; FIBER OPTIC SENSORS; GEARS; GOLD; MICA; PIEZOELECTRIC DEVICES; STEPPING MOTORS; THIN FILMS; VACUUM;

FORCE DISTANCE CURVES; GEAR REDUCTION SYSTEM; LEVER DEFLECTIONS; SCANNING FORCE MICROSCOPES; STEPPER MOTOR; ULTRAHIGH VACUUM SYSTEM;

MICROSCOPES;

EID: 0030214241     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147079     Document Type: Article

References (18)

1. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
2. G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 2400 (1988).
3. L. Howald, E. Meyer, R. Lüthi, H. Haefke, R. Overney, H. Rudin, and H.-J. Güntherodt, Appl. Phys. Lett. 63, 117 (1993).
4. M. Kageshima, H. Yamada, K. Nakayama, H. Sakama, M. Kawazu, T. Fujii, and M. Suzuki, J. Vac. Sci. Technol. B 11, 1987 (1993).
5. F. J. Giessibl, Ch. Gerber, and G. Binnig, J. Vac. Sci. Technol. B 9, 984 (1991).
6. H. J. Hug, Th. Jung, and H.-J. Güntherodt, Rev. Sci. Instrum. 63, 3900 (1992).
7. S. R. Cohen, G. Neubauer, and G. M. McClelland, J. Vac. Sci. Technol. A 8, 3449 (1990).
8. F. J. Giessibl and B. M. Trafas, Rev. Sci. Instrum. 65, 1923 (1994).
9. F. J. Giessibl, Jpn. J. Appl. Phys. 33, 3726 (1994).
10. D. Rugar, H. J. Mamin, R. Erlandsson, J. E. Stern, and B. D. Terris, Rev. Sci. Instrum. 59, 2337 (1988).
11. D. Rugar, H. J. Mamin, and P. Guethner, Appl. Phys. Lett. 55, 2588 (1989).
12. A. Moser, H. J. Hug, Th. Jung, U. D. Schwarz, and H.-J. Güntherodt, Meas. Sci. Technol. 4, 769 (1993).
13. Type A 13.2 stepper motor, ARUN Microelectronics Ltd., England.
14. EBL No. 2 Tube Crystal, Staveley Sensors, Inc., East Hartford, CT.
15. B. Kracke, Diplomarbeit, University of Göttingen, 1992.
16. Omicron Vakuumphysik GmbH, D-65232 Taunusstein, Germany.
17. H. W. Schumacher, B. Kracke, and B. Damaschke, Thin Solid Films 264, 268 (1995).
18. B. Kracke, Dissertation, University of Göttingen, 1996.