An X-ray scattering study of laterally modulated structures: Investigation of coherence and resolution effects with a grating

Journal de Physique I

Volumn 6, Issue 8, 1996, Pages 1085-1094

  Gibaud, A ^a,b   Wang, J ^b   Tolan, M ^c   Vignaud, G ^d   Sinha, S K ^b  

^a UNIVERSITÉ DU MAINE   (France)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF KIEL   (Germany)

^d EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; ELECTROMAGNETIC WAVE DIFFRACTION; ELECTROMAGNETIC WAVE SCATTERING; ETCHING; OPTICAL RESOLVING POWER; SURFACE PROPERTIES; X RAY DIFFRACTION ANALYSIS;

COHERENCE EFFECTS; INCIDENT ANGLE; LATERALLY MODULATED STRUCTURES; RESOLUTION EFFECTS; X RAY SCATTERING STUDY;

DIFFRACTION GRATINGS;

EID: 0030213112     PISSN: 11554304     EISSN: None     Source Type: Journal    
DOI: 10.1051/jp1:1996117     Document Type: Article

References (10)

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