Sputtering and migration of trace quantities of transition metal atoms on silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 117, Issue 1-2, 1996, Pages 170-174

  Pedersen, Diane ^a   Weller, Robert A ^a   Weller, Martha Riherd ^b   Montemayor, Victor J ^b   Banks, J C ^c   Knapp, J A ^c  

^a VANDERBILT UNIVERSITY   (United States)

^b MIDDLE TENNESSEE STATE UNIVERSITY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; GOLD; ION BOMBARDMENT; IRON; MOLYBDENUM; NITROGEN; SILICON WAFERS; SPECTROMETRY; SPUTTERING; SURFACES; TRANSITION METALS; TUNGSTEN;

ATOM MIGRATION; HEAVY ION BACKSCATTERING SPECTROMETRY; NITROGEN BOMBARDMENT; SILICON SURFACES; SUBMONOLAYER COVERAGES; TIME OF FLIGHT BACKSCATTERING; TRACE QUANTITIES; TRANSITION METAL ATOMS;

ATOMIC PHYSICS;

EID: 0030212328     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00225-X     Document Type: Article

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