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Volumn 32, Issue 16, 1996, Pages 1479-1480
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Ultrastrong UV written gratings in PECVD grown germanosilicate rib waveguides
a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
GERMANOSILICATE TRILAYERS;
HYDROGEN LOADING;
OPTICAL GRATINGS;
PHOTONIC INTEGRATED CIRCUITS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RIB WAVEGUIDES;
CHEMICAL VAPOR DEPOSITION;
DIFFRACTION GRATINGS;
ELECTRIC LOSSES;
ELECTROMAGNETIC WAVE POLARIZATION;
FABRICATION;
LIGHT TRANSMISSION;
PHOTOLITHOGRAPHY;
PLASMA APPLICATIONS;
SEMICONDUCTING GERMANIUM;
SEMICONDUCTOR DOPING;
SILICA;
ULTRAVIOLET RADIATION;
OPTICAL WAVEGUIDES;
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EID: 0030211578
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:19961004 Document Type: Article |
Times cited : (18)
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References (6)
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