Temporal behavior of charged particles in a radio frequency afterglow plasma containing negative ions

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 8, 1996, Pages 4494-4497

  Ohtsu, Yasunori ^a   Seki, Takuma ^a   Fujita, Hiroharu ^a  

^a SAGA UNIVERSITY   (Japan)

Author keywords

Electron attachment; Negative ions; Pulse modulation technique; rf afterglow plasma; Time resolved Langmuirprobe technique

Indexed keywords

ELECTRON ATTACHMENT; NEGATIVE IONS; RADIO FREQUENCY AFTERGLOW PLASMA; TIME RESOLVED LANGMUIR PROBE TECHNIQUE;

CARRIER CONCENTRATION; EXPERIMENTS; GLOW DISCHARGES; IONS; PLASMAS; PULSE MODULATION;

CHARGED PARTICLES;

EID: 0030206696     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.4494     Document Type: Article

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