Effect of O2+ and O+ on the growth of Bi2Sr2Can-1CunOy superconducting films in RF magnetron sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers

Volumn 35, Issue 8, 1996, Pages 4297-4301

  Harada, K ^a   Kishida, S ^a   Matsuoka, T ^a   Maruyama, T ^a   Tokutaka, H ^a   Fujimura, K ^a  

^a TOTTORI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTS; HELIUM; HIGH TEMPERATURE SUPERCONDUCTORS; MAGNETRON SPUTTERING; MOLECULES; OXYGEN;

ACTIVE OXYGEN PARTICLES; HELIUM GAS; PENNING EFFECT;

SUPERCONDUCTING FILMS;

EID: 0030206678     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.4297     Document Type: Article

References (0)