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Volumn 35, Issue 8, 1996, Pages 4265-4273

Stable solution method for viscoelastic oxidation including stress-dependent viscosity

Author keywords

Oxidation induced stress; Process simulation; Thermal oxidation of silicon; Viscoelastic oxidation

Indexed keywords

OXIDATION-INDUCED STRESS; PROCESS SIMULATION; THERMAL OXIDATION OF SILICON; VISCOELASTIC OXIDATION;

CALCULATIONS; COMPUTER SIMULATION; OXIDATION; SOLID SOLUTIONS; VISCOELASTICITY;

SEMICONDUCTING SILICON;

EID: 0030205497 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.35.4265 Document Type: Article

Times cited : (10)

References (14)

1
- 0020782259
- D. Chin, S.-Y. Oh, S.-M. Hu and R. W. Dutton: IEEE Trans. Electron Devices 30 (1983) 744.
- (1983) IEEE Trans. Electron Devices , vol.30 , pp. 744
- Chin, D.¹ Oh, S.-Y.² Hu, S.-M.³ Dutton, R.W.⁴

2
- 0001391263
- H. Matsumoto and M. Fukuma: IEEE Trans. Electron Devices 32 (1985) 132.
- (1985) IEEE Trans. Electron Devices , vol.32 , pp. 132
- Matsumoto, H.¹ Fukuma, M.²

3
- 0020205589
- E. A. Irene, E. Tierney and J. Angilello: J. Electrochem. Soc. 129 (1982) 2594.
- (1982) J. Electrochem. Soc. , vol.129 , pp. 2594
- Irene, E.A.¹ Tierney, E.² Angilello, J.³

4
- 21544464097
- E. P. EerNisse: Appl. Phys. Lett. 35 (1979) 8.
- (1979) Appl. Phys. Lett. , vol.35 , pp. 8
- EerNisse, E.P.¹

5
- 0024769421
- P. Sutardja and W. G. Oldham: IEEE Trans. Electron Devices 36 (1989) 2415.
- (1989) IEEE Trans. Electron Devices , vol.36 , pp. 2415
- Sutardja, P.¹ Oldham, W.G.²

6
- 0024870442
- N. Saito, H. Miura, S. Sakata, M. Ikegawa, T. Shimizu and H. Masuda: IEDM Tech. Dig. (1989) p. 695.
- (1989) IEDM Tech. Dig. , pp. 695
- Saito, N.¹ Miura, H.² Sakata, S.³ Ikegawa, M.⁴ Shimizu, T.⁵ Masuda, H.⁶

7
- 0026226093
- in Japanese
- N. Saito, S. Sakata, M. Ikegawa, H. Miura, T. Shimizu, S. Isomae and H. Masuda: Kikai Gakkai Ronbun-shu A 57 (1989) 2057 [in Japanese].
- (1989) Kikai Gakkai Ronbun-shu A , vol.57 , pp. 2057
- Saito, N.¹ Sakata, S.² Ikegawa, M.³ Miura, H.⁴ Shimizu, T.⁵ Isomae, S.⁶ Masuda, H.⁷

8
- 0020845094
- C. H. Hsueh and A. G. Evans: J. Appl. Phys. 54 (1983) 6672.
- (1983) J. Appl. Phys. , vol.54 , pp. 6672
- Hsueh, C.H.¹ Evans, A.G.²

9
- 0026368089
- J. P. Peng, D. Chidambarrao and G. R. Srinivasan: COMPEL 10 (1991) 341.
- (1991) COMPEL , vol.10 , pp. 341
- Peng, J.P.¹ Chidambarrao, D.² Srinivasan, G.R.³

10
- 0003453202
- McGraw-Hill, Maidenhead, 3rd ed.
- O. C. Zienkiewicz: The Finite Element Method (McGraw-Hill, Maidenhead, 1977) 3rd ed.
- (1977) The Finite Element Method
- Zienkiewicz, O.C.¹

11
- 0000138840
- G. Hetherington, K. H. Jack and J. C. Kennedy: Phys. Chem. Glasses 5 (1964) 130.
- (1964) Phys. Chem. Glasses , vol.5 , pp. 130
- Hetherington, G.¹ Jack, K.H.² Kennedy, J.C.³

12
- 0019621326
- R. R. Razouk, L. N. Lin and B. E. Deal: J. Electrochem. Soc. 128 (1981) 2214.
- (1981) J. Electrochem. Soc. , vol.128 , pp. 2214
- Razouk, R.R.¹ Lin, L.N.² Deal, B.E.³

13
- 0017980945
- E. A. Taft: J. Electrochem. Soc. 125 (1978) 968.
- (1978) J. Electrochem. Soc. , vol.125 , pp. 968
- Taft, E.A.¹

14
- 0001732177
- L. M. Landsberger and W. A. Tiller: Appl. Phys. Lett. 51 (1987) 1416.
- (1987) Appl. Phys. Lett. , vol.51 , pp. 1416
- Landsberger, L.M.¹ Tiller, W.A.²

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