A fluid model of the bulk plasma in a cylindrical magnetized low-pressure RF discharge and comparison with PIC-MC simulation results

Plasma Sources Science and Technology

Volumn 5, Issue 3, 1996, Pages 389-400

  Krimke, Ralf ^a   Urbassek, Herbert M ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DIFFUSION IN GASES; ELECTRIC DISCHARGES; ELECTRON TRANSPORT PROPERTIES; MAGNETIC FIELD EFFECTS; MAGNETIZATION; MAGNETOHYDRODYNAMICS; MATHEMATICAL MODELS; MAXWELL EQUATIONS; MONTE CARLO METHODS;

MAGNETIZED DISCHARGES; PARTICLE IN CELL MONTE CARLO (PICMC) SIMULATION;

MAGNETOPLASMA;

EID: 0030204350     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/3/006     Document Type: Review

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