Microwear mechanisms of silicon sliding against diamond in water vapor

Tribology Transactions

Volumn 39, Issue 3, 1996, Pages 621-626

  Xu, Junguo ^a   Kato, Koji ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Diamond; Friction; Silicon; Wear

Indexed keywords

CHEMICAL EQUIPMENT; CONTACTS (FLUID MECHANICS); CUTTING; DIAMONDS; EXPERIMENTS; FRACTURE; FRICTION; PRECISION ENGINEERING; PRESSURE EFFECTS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SILICON; STEAM; TRIBOLOGY; VAPORS;

ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY; FRICTION COEFFICIENT; HERTZIAN CONTACT PRESSURE; MICROCUTTING; MICROWEAR MECHANISMS; SLIDING; SLIDING CONTACT; WATER VAPOR PRESSURE; WEAR; WEAR MODE DIAGRAM;

TRIBOLOGY; WEAR OF MATERIALS;

DIAMONDS; SILICON; SLIDING; WATER VAPOUR; WEAR;

EID: 0030198847     PISSN: 10402004     EISSN: 1547397X     Source Type: Journal    
DOI: 10.1080/10402009608983575     Document Type: Article

References (22)

1. Bhushan, B., Dominiak, M. and Lazzari, J. P., "Contact-Start-StopStudies With Silicon Planar Head Siders Against Thin-Film Disks," IEEE Trans. on Magnetics, 28, 5, pp 2874-2876, (1992).
2. Bhushan, B. and Venkatesan, S., "Mechanical and Tribological Properties of Silicon for Micromechanical Application: A Review," Advances in Information Storage Systems, 5, pp 211-239, (1992).
3. Gabriel, K.J., Behi, F., Mahadevan, R. and Mehrcgany, M., "In Situ Friction and Wear Measurements in Integrated Polysilicon Mechanisms," Sensors and Actuators, A21-A23, pp 184-188, (1990).
4. Tai, Y. C. and Muller, R. S., "Friction.Study of IC-processed Micromotors," Sensors and Actuators, A21-A23, pp 180-183, (1990).
5. Mishina, H., "Friction and Wear of Semiconductors in Sliding Contact with Pure Metal," Trib. Int'l., 21, 2, pp 76-82, (1988).
6. Mishina, H. and Buckley, D. H., "Friction Behavior of Silicon in Contact with Titanium, Nickel, Silver, and Copper," NASA TP-2362, (1984)..
7. Mishina, H. and Buckley, D. H., "Effect of Barrier Height on Friction Behavior of the Scmiconduclions of Silicon and Gallium Arsenide in Contact with Pure Metals," NASA TP-2405, (1984).
8. Bayer, R. G., "Influence of Oxygen on the Wear of Silicon," Wear, 69, pp 235-239, (1981).
9. Danyluk, S. and Lee, S. W., "Surface Stales and the Temperature Dependence of Microindentation Damage in Silicon," Jour. Appl. Phys., 64, 8, pp 4075-4081,(1988).
10. Danyluk, S. and Clark, J. L., "The Wear Rate of n-Type Si(100)," Wear, 103, pp 149-159, (1985).
11. Lim, D. S. and Danyluk, S., "Surface Damage of Single-Crystal Silicon Abraded in Ethanol and Deionized Water," Jour, Mat'l. Sci., 20, pp 4084- 4090, (1985).
12. Kim, J. M. and Danyluk, S., "The Influence of Environmental Fluids and Temperature on the Cut-Surface Morphology of Single-Crystal Silicon," Jour. Mat'l. Sci., 22, pp 1987-1992, (1987).
13. Lim, D. S. and Danyluk, S., "Correlation of Dynamic Friction and the Dislocation Etch Pit Density Surrounding Annealed Scratches in p-Type Silicon," your. Mat'l. Sci., 23, pp 2607-2612, (1988).
14. Danyluk, S., Lee, S. W. and Ahu, J. H., "Resistivity of Linear Scratches in Doped n-Type Single-Crystal Silicon," Jour. Appl. Phys., 69, 3, pp 4568-4571, (1988).
15. Zanoria, E. and Danyluk, S., "Ball-on-Flat Reciprocating Sliding Wear of Single-Crystal, Semiconductor Silicon at Room Temperature," Wear, 162-164, pp 332-338, (1993).
16. Mizuhara, K. and Hsu, S. M., "Tribochemical Reactions of Oxygen and Water With Silicon Surface," in Proc. 19th Leeds-Lyon Conf., pp 323-328, (1992).
17. Mizuhara, K. and Hsu, S. M., "Tribochemistry of Silicon-Based Ceramics Under Aqueous Solution," in Proc. of Eurotrib '93, 3, pp 52-57, (1993).
18. Venkatesan, S. and Bhushan, B., "The Role of Environment in the Friction and Wear of Single-Crystal Silicon in Sliding Contact with Thin-Film Magnetic Rigid Disks," Adv. Info. Storage Sysl., 5, pp 241-257, (1993).
19. Majumdar, A. and Bhushan, B., "Role of Fractal Geometry in Roughness Characterization and Comae! Mechanics of Surfaces," Jour, of Trib., 112, pp 205-216, (1990).
20. Majumdar, A. and Bhushan, B., "Fractal Model of Elastic-Plastic Contact Between Rough Surfaces," Jour, of Trib., 113, pp 1-11. (1991).
21. Stanley, H. M., Etsion, I. and Bogy, D. B., "Adhesion of Contacting Rough Surfaces in the Presence of Subboundary Lubrication," Jour, of Trib., 112, pp 98-104, (1990).
22. Li, Y. and Talke, F. E., "A Model for the Effect of Humidity on Stiction of the Head/Disk Interface," Tribology and Mechanics of Magnetic Storage Systems, Bhushan, B. and Eiss, N.J. Jr., eds., STLE, Park Ridge, IL, Vol. VII, SP-29, pp 79-84, (1990).