Pyroelectric infrared sensor using PZT thin plate on diaphragm as sensitive elements

Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi)

Volumn 79, Issue 7, 1996, Pages 86-96

  Taniguchi, Yoshiharu ^a,c,d   Murakami, Kensuke ^a,e,f,g   Kobayashi, Hiroshi ^b,h,i,j,k,l   Tanaka, Shosaku ^b,l  

^a Nippon Ceramic Co Ltd   (Japan)

^b TOTTORI UNIVERSITY   (Japan)

^c RITSUMEIKAN UNIVERSITY   (Japan)

^d Nippon Ferrite Industries

^e University of Electro Communications

^f Hitachi Iruma Electronics

^g Japan Applied Physical Society

^h OSAKA UNIVERSITY   (Japan)

ⁱ STANFORD UNIVERSITY   (United States)

^j Tottori University ^*

^k Fr Natl Communications Laboratory

^l Society for Information Display

more..

Author keywords

Diaphragm structure; Infrared sensor; Pyroelectric sensor; PZT ceramics

Indexed keywords

CERAMIC MATERIALS; MICROMACHINING; MODELS; PIEZOELECTRIC MATERIALS; PYROELECTRICITY; SILICON; SPECIFIC HEAT OF SOLIDS; TESTING;

DIAPHRAGM STRUCTURE; NOISE EQUIVALENT POWER; PYROELECTRIC INFRARED SENSOR; RESPONSE SPEED; VOLTAGE RESPONSIVITY;

SENSORS;

EID: 0030197275     PISSN: 8756663X     EISSN: None     Source Type: Journal    
DOI: 10.1002/ecjb.4420790710     Document Type: Article

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