ITO films for antireflective and antistatic tube coatings prepared by d.C. magnetron sputtering

Surface and Coatings Technology

Volumn 82, Issue 1-2, 1996, Pages 90-98

  Lobl H P ^a   Huppertz, M ^a   Mergel, D ^b  

^a PHILIPS RESEARCH LABORATORIES   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Conductivity; Donors; Film growth; Indium tin oxide; Sputtering

Indexed keywords

DEFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; FILMS; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; TIN COMPOUNDS; TRANSPARENCY;

ANTISTATIC COATINGS;

ANTIREFLECTION COATINGS;

EID: 0030195582     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02644-4     Document Type: Article

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