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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 7, 1996, Pages 4027-4033

Solid-phase reactions of diffusion barriers of Ti and TiN to copper layers on SiO2

(5) Takeyama, Mayumi a Noya, Atsushi a Sakanishi, Kouichirou a Seki, Hikaru a,b Sasaki, Katsutaka a

a KITAMI INSTITUTE OF TECHNOLOGY (Japan)

b FUJITSU LABORATORIES LTD (Japan)

Author keywords

Adhesion promoter; Cu interconnect; Cu metallization; Diffusion barrier; TiN

Indexed keywords

ADHESION; COPPER; DIFFUSION; EXPERIMENTS; SEMICONDUCTOR DEVICES; X RAY DIFFRACTION;

ADHESION PROMOTER; COPPER METALLIZATION; DIFFUSION BARRIER;

THIN FILMS;

EID: 0030195394 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.35.4027 Document Type: Article

Times cited : (20)

References (30)

1
- 0024735644
- P. L. Pai and C. H. Ting: IEEE Electron Device Lett. 10 (1989) 423.
- (1989) IEEE Electron Device Lett. , vol.10 , pp. 423
- Pai, P.L.¹ Ting, C.H.²

2
- 0001042043
- C.-A. Chang: J. Vac. Sci. Technol. A 8 (1990) 3796.
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 3796
- Chang, C.-A.¹

3
- 36449007074
- S.-Q. Wang, S. Suter, C. Hoeflich and B. J. Burrow: J. Appl. Phys. 73 (1993) 2301.
- (1993) J. Appl. Phys. , vol.73 , pp. 2301
- Wang, S.-Q.¹ Suter, S.² Hoeflich, C.³ Burrow, B.J.⁴

4
- 0000156618
- H. Ono, T. Nakano and T. Ohta: Appl. Phys. Lett. 64 (1994) 1511.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1511
- Ono, H.¹ Nakano, T.² Ohta, T.³

5
- 0022738306
- J. D. Mcbrayer, R. M. Swanson and T. W. Sigmon: J. Electrochem. Soc. 133 (1986) 1242.
- (1986) J. Electrochem. Soc. , vol.133 , pp. 1242
- Mcbrayer, J.D.¹ Swanson, R.M.² Sigmon, T.W.³

6
- 36449001040
- J. Li, J. W. Mayer, Y. Shacham-Diamand and E. G. Colgan: Appl. Phys. Lett. 60 (1992) 2983.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2983
- Li, J.¹ Mayer, J.W.² Shacham-Diamand, Y.³ Colgan, E.G.⁴

7
- 0016092340
- H. Krautle, M.-A. Nicolet and J. W. Mayer: J. Appl. Phys. 45 (1974) 3304.
- (1974) J. Appl. Phys. , vol.45 , pp. 3304
- Krautle, H.¹ Nicolet, M.-A.² Mayer, J.W.³

8
- 0017956476
- R. Pretorius, J. M. Harris and M.-A. Nicolet: Solid State Electron. 21 (1978) 667.
- (1978) Solid State Electron. , vol.21 , pp. 667
- Pretorius, R.¹ Harris, J.M.² Nicolet, M.-A.³

9
- 36549100408
- S.-Q. Wang and J. W. Mayer: J. Appl. Phys. 64 (1988) 4711.
- (1988) J. Appl. Phys. , vol.64 , pp. 4711
- Wang, S.-Q.¹ Mayer, J.W.²

10
- 0343275496
- S.-Q. Wang and J. W. Mayer: J. Appl. Phys. 65 (1989) 4774.
- (1989) J. Appl. Phys. , vol.65 , pp. 4774
- Wang, S.-Q.¹ Mayer, J.W.²

11
- 0024734678
- H. Bender, W. D. Chen, J. Portillo, L. van den Hove and W. Vandervorst: Appl. Surf. Sci. 38 (1989) 37.
- (1989) Appl. Surf. Sci. , vol.38 , pp. 37
- Bender, H.¹ Chen, W.D.² Portillo, J.³ Van Den Hove, L.⁴ Vandervorst, W.⁵

12
- 0344206649
- Y. Shioya, S. Kawamura, I. Kobayashi, M. Maeda and K. Yanagida: J. Appl. Phys. 61 (1987) 5102.
- (1987) J. Appl. Phys. , vol.61 , pp. 5102
- Shioya, Y.¹ Kawamura, S.² Kobayashi, I.³ Maeda, M.⁴ Yanagida, K.⁵

13
- 0001675565
- S.-Q. Wang and J. W. Mayer: J. Appl. Phys. 67 (1990) 2932.
- (1990) J. Appl. Phys. , vol.67 , pp. 2932
- Wang, S.-Q.¹ Mayer, J.W.²

14
- 84863988940
- T. Yamauchi, H. Kitamura, N. Wakai, S. Zaima, Y. Koide and Y. Yasuda: J. Vac. Sci. Technol. A 11 (1993) 2619.
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 2619
- Yamauchi, T.¹ Kitamura, H.² Wakai, N.³ Zaima, S.⁴ Koide, Y.⁵ Yasuda, Y.⁶

15
- 0000138926
- S. W. Russell, J. W. Strane, J. W. Mayer and S. Q. Wang: J. Appl. Phys. 76 (1994) 257.
- (1994) J. Appl. Phys. , vol.76 , pp. 257
- Russell, S.W.¹ Strane, J.W.² Mayer, J.W.³ Wang, S.Q.⁴

16
- 0002723917
- J. L. Liotard, D. Gupta, P. A. Psaras and P. S. Ho: J. Appl. Phys. 57 (1985) 1895.
- (1985) J. Appl. Phys. , vol.57 , pp. 1895
- Liotard, J.L.¹ Gupta, D.² Psaras, P.A.³ Ho, P.S.⁴

17
- 0000382205
- J. Li, J. W. Strane, S. W. Russell, S. Q. Hong, J. W. Mayer, T. K. Marais, C. C. Theron and R. Pretorius: J. Appl. Phys. 72 (1992) 2810.
- (1992) J. Appl. Phys. , vol.72 , pp. 2810
- Li, J.¹ Strane, J.W.² Russell, S.W.³ Hong, S.Q.⁴ Mayer, J.W.⁵ Marais, T.K.⁶ Theron, C.C.⁷ Pretorius, R.⁸

18
- 0342549996
- S. Kumar, D. R. Chopra and G. C. Smith: J. Electron Spectrosc. & Related Phenom. 63 (1993) 145.
- (1993) J. Electron Spectrosc. & Related Phenom. , vol.63 , pp. 145
- Kumar, S.¹ Chopra, D.R.² Smith, G.C.³

19
- 0029389150
- A. R. Chourasia and D. R. Chopra: Thin Solid Films 266 (1995) 298.
- (1995) Thin Solid Films , vol.266 , pp. 298
- Chourasia, A.R.¹ Chopra, D.R.²

20
- 0020183295
- M. A. Taubenblatt and C. R. Helms: J. Appl. Phys. 53 (1982) 6308.
- (1982) J. Appl. Phys. , vol.53 , pp. 6308
- Taubenblatt, M.A.¹ Helms, C.R.²

21
- 36549092310
- S.-Q. Wang, I. Raaijmakers, B. J. Burrow, S. Suthar, S. Redkar and K.-B. Kim: J. Appl. Phys. 68 (1990) 5176.
- (1990) J. Appl. Phys. , vol.68 , pp. 5176
- Wang, S.-Q.¹ Raaijmakers, I.² Burrow, B.J.³ Suthar, S.⁴ Redkar, S.⁵ Kim, K.-B.⁶

22
- 0020090787
- M. Wittmer: J. Appl. Phys. 53 (1982) 1007.
- (1982) J. Appl. Phys. , vol.53 , pp. 1007
- Wittmer, M.¹

23
- 0003834192
- A. Zalar: Thin Solid Films 124 (1985) 233.
- (1985) Thin Solid Films , vol.124 , pp. 233
- Zalar, A.¹

24
- 0026943905
- A. Zalar, S. Hofmann, P. Panjan and V. Krasevec: Thin Solid Films 220 (1992) 191.
- (1992) Thin Solid Films , vol.220 , pp. 191
- Zalar, A.¹ Hofmann, S.² Panjan, P.³ Krasevec, V.⁴

25
- 0003459529
- ed. J. Chastain Perkin-Elmer, Minnesota
- J. F. Moulder, W. F. Stickle, P. E. Sobol and K. D. Bomben: Handbook of X-ray Photoelectron Spectroscopy, ed. J. Chastain (Perkin-Elmer, Minnesota, 1992).
- (1992) Handbook of X-ray Photoelectron Spectroscopy
- Moulder, J.F.¹ Stickle, W.F.² Sobol, P.E.³ Bomben, K.D.⁴

26
- 0003477976
- eds. G. Schulz and P. R. Bugler VCH, Weinheim
- I. Barin: Thermochemical Data of Pure Substances, eds. G. Schulz and P. R. Bugler (VCH, Weinheim, 1993).
- (1993) Thermochemical Data of Pure Substances
- Barin, I.¹

27
- 0003689862
- ed. T. B. Massalski ASM International, Ohio 2nd ed.
- J. L. Murray: Binary Alloy Phase Diagrams, ed. T. B. Massalski (ASM International, Ohio 1990) 2nd ed.
- (1990) Binary Alloy Phase Diagrams
- Murray, J.L.¹

28
- 36549090725
- R. W. Bené: J. Appl. Phys. 61 (1987) 1826.
- (1987) J. Appl. Phys. , vol.61 , pp. 1826
- Bené, R.W.¹

29
- 3643071102
- in Japanese
- T. Sasaki, S. Kagomi, K. Yoshimoto, K. Sasaki and A. Noya: IEICE Trans. Jpn. J76-C-II (1993) 629 [in Japanese).
- (1993) IEICE Trans. Jpn. , vol.J76-C-II , pp. 629
- Sasaki, T.¹ Kagomi, S.² Yoshimoto, K.³ Sasaki, K.⁴ Noya, A.⁵

30
- 0028404240
- A. Noya, M. Takeyama, K. Sasaki, E. Aoyagi and K. Hiraga: Jpn. J. Appl. Phys. 33 (1994) 1528.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 1528
- Noya, A.¹ Takeyama, M.² Sasaki, K.³ Aoyagi, E.⁴ Hiraga, K.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.