Design and performance of a new spectroscopic photon emission microscope system for the physical analysis of semiconductor devices

Review of Scientific Instruments

Volumn 67, Issue 7, 1996, Pages 2576-2583

  Chan, D S H ^a   Phang, J C H ^a   Chim, W K ^a   Liu, Y Y ^a   Tao, J M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BIPOLAR TRANSISTORS; COMPUTER SIMULATION; DEFECTS; EMISSION SPECTROSCOPY; LIGHT ABSORPTION; LIGHT EMISSION; MONOCHROMATORS; MOSFET DEVICES; OXIDES; PERFORMANCE; PHOTOMULTIPLIERS; PHOTONS;

DEFECT FINGERPRINTING; GATE OXIDES; LIGHT COLLECTION; PANCHROMATIC IMAGING; RAY TRACING; SPECTROSCOPIC PHOTON EMISSION MICROSCOPE;

MICROSCOPES;

EID: 0030194609     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147217     Document Type: Article

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