Buried refractive microlenses formed by selective oxidation of AlGaAs

Electronics Letters

Volumn 32, Issue 15, 1996, Pages 1406-1408

  Blum, O ^a   Lear, K L ^a   Hou, H Q ^a   Warren, M E ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Aluminium gallium arsenide; Oxidation

Indexed keywords

ALUMINUM; CAVITY RESONATORS; FABRICATION; MATHEMATICAL MODELS; OXIDATION; PERFORMANCE; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE;

BURIED REFRACTIVE MICROLENSES; SELECTIVE OXIDATION;

OPTICAL INSTRUMENT LENSES;

EID: 0030194528     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19960887     Document Type: Article

References (3)

1. 1-xAs-AlAs-GaAs quantum well heterostructures and superlattices', Appl. Phys. Lett., 1990, 57, pp. 2844-2846
2. CHOQUETTE, K.D., SCHNEIDER, R.P. Jr., LEAR, K.L., and GEIB, K.M.: 'Low threshold voltage vertical-cavity lasers fabricated by selective oxidation', Electron. Lett., 1994, 30, pp. 2043-2044
3. BLUM, O., KILCOYNE, S.P., WARREN, M.E., DU, T.C., LEAR, K.L., SCHNEIDER, R.P. Jr., CARSON, R.F., ROBINSON, G., and PETERS, F.H.: 'Vertical-cavity surface-emitting lasers with integrated refractive microlenses', Electron. Lett., 1995, 31, pp. 44-45