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Volumn 156, Issue 1, 1996, Pages 63-70
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Slip generation during rapid thermal processing
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
HEATING;
SILICON WAFERS;
TEMPERATURE MEASUREMENT;
THERMOOXIDATION;
THERMOPILES;
X RAY ANALYSIS;
YIELD STRESS;
HEATING RATE;
RAPID THERMAL OXIDATION;
RAPID THERMAL PROCESSING;
SLIP GENERATION;
X RAY TOPOGRAPHY;
ANNEALING;
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EID: 0030194208
PISSN: 00318965
EISSN: None
Source Type: Journal
DOI: 10.1002/pssa.2211560109 Document Type: Article |
Times cited : (4)
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References (18)
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