Hydrogenated poly(p-vinylphenol) for microlithography

Industrial and Engineering Chemistry Research

Volumn 35, Issue 7, 1996, Pages 2414-2419

  Matsumoto, Tadashi ^a   Akaho, Mitsuru ^a   Noguchi, Takeshi ^a   Otsu, Kunishige ^a   Matsukami, Teruki ^a   Kaneko, Masao ^a  

^a Maruzen Petrochemical Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DURABILITY; HYDROGENATION; LIGHT TRANSMISSION; MOLECULAR STRUCTURE; OPTICAL MATERIALS; PHOTORESISTS; PHOTOSENSITIVITY;

CYCLOHEXANOLIC STRUCTURE; POLY(P VINYLPHENOL);

VINYL RESINS;

EID: 0030193804     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie950610l     Document Type: Article

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