Preparation of YBa2Cu3O7-δ thin films by metal-organic chemical vapor deposition using liquid sources

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 7 PART A, 1996, Pages

  Ito, Yoshiaki ^a   Yoshida, Yutaka ^a   Mizushima, Yasuyuki ^a   Hirabayashi, Izumi ^a   Nagai, Hisashi ^b   Takai, Yoshiaki ^b  

^a SUPERCONDUCTIVITY RESEARCH LABORATORY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Liquid MO source; MOCVD; Superconductivity; Thin film; YBCO

Indexed keywords

ADDITION REACTIONS; COMPOSITION; FLUORINE; LIQUIDS; MELTING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SECONDARY ION MASS SPECTROMETRY; SUPERCONDUCTIVITY; THIN FILMS; VAPOR PRESSURE; WATER; YTTRIUM COMPOUNDS;

FLUORINE TO OXYGEN RATIO; LIQUID METALLORGANIC SOURCES; MELTING POINTS; YTTRIUM BARIUM COPPER OXIDE THIN FILMS;

SUPERCONDUCTING FILMS;

EID: 0030193050     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l825     Document Type: Article

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