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Volumn 19, Issue 8, 1996, Pages
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Total room temperature wet cleaning of silicon surfaces
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CLEANING;
DEPOSITION;
ELECTRON DIFFRACTION;
FILM GROWTH;
INTEGRATED CIRCUIT MANUFACTURE;
ION BOMBARDMENT;
SINGLE CRYSTALS;
SUBSTRATES;
SURFACES;
THIN FILMS;
ULSI CIRCUITS;
SEMICONDUCTOR SURFACE PHYSICS;
SILICON WET PROCESSING;
TOTAL ROOM TEMPERATURE WET CLEANING;
ULTRACLEAN;
ULTRAPURE WATER;
WAFER;
SEMICONDUCTING SILICON;
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EID: 0030191687
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (37)
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