|
|
|
Volumn 19, Issue 8, 1996, Pages
|
|
Resist enhancement with antireflective coatings
a
a
NONE
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
INORGANIC COATINGS;
INORGANIC COMPOUNDS;
LIGHT ABSORPTION;
LIGHT TRANSMISSION;
ORGANIC COATINGS;
ORGANIC POLYMERS;
PERFORMANCE;
PHOTORESISTS;
PLASTIC FILMS;
REFLECTION;
REFRACTIVE INDEX;
SUBSTRATES;
BOTTOM ANTIREFLECTIVE COATINGS;
CRITICAL DIMENSION CONTROL;
EXPOSURE WAVELENGTHS;
FEATURE SIZES;
GATE LEVELS;
RESIST ENHANCEMENT;
SWING RATIOS;
THIN FILM INTERFERENCE;
TOLERANCE LIMITS;
TOP ANTIREFLECTIVE COATINGS;
ANTIREFLECTION COATINGS;
|
|
EID: 0030191230
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
|
Times cited : (2)
|
|
References (4)
|
