Texture of titanium self-aligned silicide (salicide)

Scripta Materialia

Volumn 35, Issue 1, 1996, Pages 53-58

  Wan, Wen Kai ^a   Wu, Shinn Tyan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY OF SOLIDS; SPUTTER DEPOSITION; TEXTURES; THERMAL EFFECTS; THIN FILMS; TITANIUM; TITANIUM COMPOUNDS;

TITANIUM SELF ALIGNED SILICIDE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0030190839     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/1359-6462(96)00103-0     Document Type: Article

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