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Volumn 164, Issue 1-4, 1996, Pages 185-189
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The nitridation of GaAs and GaN deposition on GaAs examined by in situ time-of-flight low energy ion scattering and RHEED
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL LATTICES;
DEPOSITION;
ELECTRON CYCLOTRON RESONANCE;
IMPURITIES;
NITRIDES;
REFLECTION HIGH ENERGY ELECTRON DIFFRACTION;
SEMICONDUCTING GALLIUM COMPOUNDS;
SURFACE STRUCTURE;
LATTICE MISMATCH;
NITRIDATION;
TIME OF FLIGHT LOW ENERGY ION SCATTERING;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0030190556
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-0248(96)00032-2 Document Type: Article |
Times cited : (7)
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References (14)
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