Marker alignment method for passive laser coupling on silicon waferboard

IEICE Transactions on Communications

Volumn E79-B, Issue 7, 1996, Pages 939-942

  Sasaki, Seimi ^a   Nakagawa, Gohji ^a   Tanaka, Kazuhiro ^a   Miura, Kazunori ^a   Yano, Mitsuhiro ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Laser diode; Marker; Optical coupling; Passive alignment; Silicon platform

Indexed keywords

DESIGN; LASER APPLICATIONS; LITHOGRAPHY; PHOTOLITHOGRAPHY; SILICON; WSI CIRCUITS;

LASER DIODE; MARKER; OPTICAL COUPLING; PASSIVE ALIGNMENT; SILICON PLATFORM;

OPTICAL FIBER COUPLING;

EID: 0030189215     PISSN: 09168516     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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