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Volumn 15, Issue 3, 1996, Pages 194-195
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Relation between EL2 group and EL6 group in SI-GaAs
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Author keywords
EL2; EL6; PITS technique; Rapid thermal annealing; SI GaAs
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Indexed keywords
ANNEALING;
CRYSTAL DEFECTS;
ELECTRON ENERGY LEVELS;
SILICON ON INSULATOR TECHNOLOGY;
SPECTROMETRY;
PHOTOINDUCED TRANSIENT SPECTROSCOPY;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0030182323
PISSN: 10010521
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (1)
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References (18)
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