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Volumn 15, Issue 3, 1996, Pages 194-195

Relation between EL2 group and EL6 group in SI-GaAs

Author keywords

EL2; EL6; PITS technique; Rapid thermal annealing; SI GaAs

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; ELECTRON ENERGY LEVELS; SILICON ON INSULATOR TECHNOLOGY; SPECTROMETRY;

EID: 0030182323     PISSN: 10010521     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (1)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.