The photoelectromagnetic effect in planar silicon structures

Sensors and Actuators, A: Physical

Volumn 55, Issue 2-3, 1996, Pages 115-120

  Creemer, J F ^a   Middelhoek, S ^a   Sarro, P M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Photoelectromagnetic effect; Planar silicon structures

Indexed keywords

DENSITY MEASUREMENT (OPTICAL); SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SENSORS; VOLTAGE MEASUREMENT;

IRRADIANCE; PLANAR SILICON STRUCTURES;

PHOTOELECTROMAGNETIC EFFECTS;

EID: 0030181561     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80065-9     Document Type: Article

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