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Volumn 47, Issue 6-8, 1996, Pages 493-496

XHV integrated process with magnetic levitation transports

Author keywords

Extreme high vacuum; Integrated process; Linear motor; Magnetic levitation transports; Superconducting magnet

Indexed keywords

DUST; GAS ABSORPTION; LINEAR MOTORS; MAGNETIC LEVITATION; MAGNETIZATION; OXIDE SUPERCONDUCTORS; SUPERCONDUCTING MAGNETS; SURFACES; VACUUM GAGES; VACUUM PUMPS; VALVES (MECHANICAL); YTTRIUM COMPOUNDS;

EID: 0030173643     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00006-1     Document Type: Article
Times cited : (7)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.