![]() |
Volumn 47, Issue 6-8, 1996, Pages 493-496
|
XHV integrated process with magnetic levitation transports
a
|
Author keywords
Extreme high vacuum; Integrated process; Linear motor; Magnetic levitation transports; Superconducting magnet
|
Indexed keywords
DUST;
GAS ABSORPTION;
LINEAR MOTORS;
MAGNETIC LEVITATION;
MAGNETIZATION;
OXIDE SUPERCONDUCTORS;
SUPERCONDUCTING MAGNETS;
SURFACES;
VACUUM GAGES;
VACUUM PUMPS;
VALVES (MECHANICAL);
YTTRIUM COMPOUNDS;
EXTREME HIGH VACUUM;
FILM PREPARATION CHAMBER;
GATE VALVES;
INTERFACING CHAMBERS;
SUPERCONDUCTING MAGNET DISCS;
SURFACE ANALYSIS CHAMBERS;
TANTALUM GETTER PUMP;
ULTRACLEAN SURFACE;
YTTRIUM BARIUM CUPRATE;
HIGH PRESSURE ENGINEERING;
|
EID: 0030173643
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/0042-207x(96)00006-1 Document Type: Article |
Times cited : (7)
|
References (5)
|