Hydrogen desorption from copper during ion bombardment measured by SIMS

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 737-739

  Nagai, Y ^a   Saito, Y ^b   Matuda, N ^c  

^a HITACHI CABLE LTD   (Japan)

^b HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION KEK   (Japan)

^c TOKYO DENKI UNIVERSITY   (Japan)

Author keywords

Copper; Gas desorption; Ion bombardment; Microstructure; Vacuum degassing

Indexed keywords

COPPER; DEFECTS; DEGASSING; GRAIN BOUNDARIES; HYDROGEN; ION BOMBARDMENT; MICROSTRUCTURE; POROSITY; SECONDARY ION MASS SPECTROMETRY; SENSITIVITY ANALYSIS; THERMAL DIFFUSION; VACUUM APPLICATIONS;

GRAIN BOUNDARY DIFFUSION; HYDROGEN CONCENTRATION; HYDROGEN ION INTENSITY;

DESORPTION;

EID: 0030173640     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00147-9     Document Type: Article

References (7)

1. A Benninghoven, Surface Sci, 35, 427 (1973).
2. Y Nagai, S Sakai, Y Saito, N Matuda and G Horikoshi, Vacuum, 41, 2100 (1990).
3. E Taglauer and W Heiland, J Nucl Mater, 93/94, 823 (1980).
4. H S Levine and C J MacCallum J Appl Phys, 31, 595 (1960).
5. N L Peterson, J Vac Sci Technol, A4, 3066 (1986).
6. T Hino, H Okado and M Kanno, Scr Metall Mater, 29, 1029 (1993).
7. Y Ishikawa and T Yoshimura, J Vac Sci Technol, 9, 2021 (1991).