Sensitivity reduction and restoration in an extractor gauge

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 567-569

  Watanabe, F ^a  

^a Tsukuba Laboratory   (Japan)

Author keywords

Extractor gauge; Gauge calibration; Gauge sensitivity; Modulation gauge; XHV pressure measurement

Indexed keywords

ALUMINUM ALLOYS; CALIBRATION; ELECTRIC CURRENTS; GLOW DISCHARGES; NETWORKS (CIRCUITS); NITRIDES; PRESSURE MEASUREMENT; VACUUM PUMPS; VACUUM TECHNOLOGY;

EXTRACTOR GAUGE; GAUGE CALIBRATION; GAUGE SENSITIVITY; MODULATION GAUGE; NORMAL POSITIVE POTENTIAL; SENSITIVITY REDUCTION;

VACUUM GAGES;

EID: 0030172810     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00021-8     Document Type: Article

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