RBS with monolayer resolution

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 113, Issue 1-4, 1996, Pages 270-274

  Kimura, Kenji ^a   Mannami, Michi Hiko ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CALCULATIONS; ELECTRON SCATTERING; IONS; KINEMATICS; OPTICAL RESOLVING POWER; SPECTROMETERS;

ATOMIC LAYER; HIGH RESOLUTION RUTHERFORD BACKSCATTERING SPECTROSCOPY; MAGNETIC SPECTROMETER; MONOLAYER RESOLUTION; SOLID STATE DETECTOR;

RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 0030172390     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01326-1     Document Type: Article

References (16)

1. For example, L.C. Feldman and J.W. Mayer, Fundamentals of Surface and Thin Film Analysis (North-Holland, Amsterdam, 1986).
2. E. Bøgh, Phys. Rev. Lett. 19 (1967) 61.
3. J.K. Hirvonen and G.K. Hulbler, in: Ion Beam Surface Layer Analysis, eds. O. Meyer et al. (Plenum, New York, 1976) p. 457.
4. A. Feuerstein, H. Grahmann, S. Kalbitzer and H. Oetzmann, ibid., p. 471.
5. Th. Enders, M. Rilli and H.D. Carstanjen, Nucl. Instr. and Meth. B 64 (1992) 817.
6. J. Vrijmoeth, P.M. Zagwijn, J.W.M. Frenken and J.F. van der Veen, Phys. Rev. Lett. 67 (1991) 1134.
7. K. Kimura, K. Ohshima and M. Mannami, Appl. Phys. Lett. 64 (1994) 2232.
8. J. Lindhard and M. Scharff, K. Dan. Viedensk. Selsk. Mat. Fys. Medd. 28 (1954) No. 8.
9. R. Kawai, N. Itoh and Y.H. Ohtsuki, Surf. Sci. 114 (1982) 137.
10. H.H. Andersen and J.F. Ziegler, The Stopping and Ranges of Ions in Matter (Pergamon, New York, 1977).
11. F.C. Frank and J.H. van der Merwe, Proc. R. Soc. London, Ser. A 198 (1949) 205; A 200 (1949) 125.
12. F.C. Frank and J.H. van der Merwe, Proc. R. Soc. London, Ser. A 198 (1949) 205; A 200 (1949) 125.
13. M. Volmer and A. Weber, Z. Phys. Chem. 119 (1926) 277.
14. J.N. Stranski and L. Krastanov, Ber. Akad. Wiss. Wien 146 (1938) 797.
15. M. Tsuji, Y. Mizuno, Y. Susuki and M. Mannami, J. Cryst. Growth 108 (1991) 817.
16. K. Kimura, K. Nakajima, Y. Fujii and M. Mannami, Surf. Sci. 318 (1994) 363.