Measurements of outgassing rate from copper and copper alloy chambers

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 709-711

  Koyatsu, Y ^a   Miki, H ^a   Watanabe, F ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b Tsukuba Laboratory   (Japan)

Author keywords

AES; Chromium copper; Copper; Outgassing rate; Throughput method

Indexed keywords

COPPER; COPPER ALLOYS; FLANGES; GASKETS; SEALING (CLOSING); VACUUM;

BAKEOUT; CONFLAT FLANGE; NITROGEN EQUIVALENCY; THROUGHPUT METHOD; VACUUM CHAMBERS;

DEGASSING;

EID: 0030171875     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00053-x     Document Type: Article

References (4)

1. F Watanabe, Y Koyatsu, K Fujimori, H Miki and A Kasai, J Vac Sci Technol, A 13, 140 (1995).
2. F Watanabe, J Vac Sci Technol, A 11, 432 (1993).
3. F Watanabe, M Suemitsu and N Miyamoto, J Vac Sci Technol, A 13, 147 (1995).
4. F Watanabe, Y Koyatsu and H Miki, J Vac Sci Technol, A 13, 2587 (1995).