Finite-element analysis of the interface influence on hardness measurements of thin films

Surface and Coatings Technology

Volumn 81, Issue 2-3, 1996, Pages 240-255

  Cai, X ^a,b   Bangert, H ^b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Finite element analysis; Hardness; Thin films

Indexed keywords

COATED MATERIALS; FINITE ELEMENT METHOD; HARDNESS TESTING; STRAIN HARDENING; STRAIN RATE; STRENGTH OF MATERIALS; STRESS CONCENTRATION; SUBSTRATES; YIELD STRESS;

INDENTATION HARDNESS MEASUREMENT;

THIN FILMS;

EID: 0030171769     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02482-4     Document Type: Article

References (16)

1. B. Jönsson and S. Hogmark, Thin Solid Films, 114 (1984) 257.
2. H. Bangert and A. Wagendristel, J. Vac. Sci. Technol. A, 4 (1986) 2956.
3. A. Thomas, Surf. Eng., 3 (1987) 117.
4. P.K. Mehrothra and D.T. Quinto, J. Vac. Sci. Technol. A, 3 (1985) 2401.
5. P.J. Burnett and D.S. Rickerby, Surf. Eng., 3 (1987) 69.
6. F. Sahulze and H. Hanemann, Z. Metallkd., 33 (1941) 124.
7. C. Feldman, F. Ordway and J. Bernstein, J. Vac. Sci. Technol. A, 8 (1990) 117.
8. B. Rother and D.A. Dietrich, Phys. Status Solidi A, 142 (1994) 389.
9. T.A. Lawson and J.C. Simo, J. Mater. Res., 7 (1992) 618.
10. E.R. Kral, K. Komvopoulos and D.B. Bogy, J. Appl. Mech., 60 (1993) 829.
11. A.K. Bhattacharya and W.D. Nix, Int. J. Solids Structures, 27 (1991) 1047.
12. H.F. Wang, X. Yang, H. Bangert, P. Torzicky and L. Wen, Thin Solid Films, 214 (1992) 68.
13. H.F. Wang and H. Bangert, Mater. Sci. Eng., A163 (1993) 43.
14. X. Cai and H. Bangert, Thin Solid Films, 264 (1995) 59.
15. MARC Program Documentation, MARC Analysis Research Corporation, Palo Alto, CA, 1977-1994.
16. R.T. Bathe, Finite Element Procedures in Engineering Analysis, Prentice-Hall, Englewood Cliffs, NJ, 1982.