Rarefied gas flow between two flat plates with two dimensional surface roughness

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 791-794

  Sugiyama, Wataru ^a   Sawada, Tadashi ^a   Nakamori, Kenji ^b  

^a AKITA UNIVERSITY   (Japan)

^b ULVAC INC   (Japan)

Author keywords

Internal flow; Molecular flow; Monte Carlo method; Surface roughness; Two dimensional roughness

Indexed keywords

CALCULATIONS; MACHINING; MOLECULES; MONTE CARLO METHODS; SURFACE PHENOMENA; SURFACE ROUGHNESS; VACUUM;

INTERNAL FLOW; INVERSE KNUDSEN NUMBERS; MOLECULAR FLOW; RAREFIED GAS FLOW; TWO DIMENSIONAL SURFACE ROUGHNESS; TWO DIMENSIONAL TRIANGULAR WAVES; VACUUM CHAMBER;

FLOW OF FLUIDS;

EID: 0030170023     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00068-1     Document Type: Article

References (4)

1. D H Davis, L L Levenson and N Milleron, J Appl Phys, 35, 529 (1964).
2. M Usami, T Fujimoto and S Kato, Trans Jpn Soc Mech Eng, 54-501, B1042 (1988).
3. T Sawada and M Nakamura, J Vacuum Society of Japan, 34, 311 (1991).
4. K Nanbu, The Memoirs of The Institute of Fluid Science, Vol. 3. Tohoku University, p. 47 (1992).