Investigation of optical losses in photoelastic and ridge waveguides in GaAs-AlGaAs heterostructures

IEEE Photonics Technology Letters

Volumn 8, Issue 6, 1996, Pages 806-808

  Liu, Q Z ^a,b   Yu, L S ^b   Lau, S S ^b   Zappe, H P ^c   Epler, J E ^c  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; ELECTRIC LOSSES; HETEROJUNCTIONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NICKEL COMPOUNDS; PHOTOLITHOGRAPHY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; TUNGSTEN COMPOUNDS;

COMPRESSIVE STRESSORS; ELECTRON BEAM EVAPORATOR; METAL SEMICONDUCTOR REACTIONS; OPTICAL LOSSES; PHOTOELASTIC WAVEGUIDE; RIDGE WAVEGUIDE;

OPTICAL WAVEGUIDES;

EID: 0030169242     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.502101     Document Type: Article

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