Primary and transfer standards for vacuum and mass flow in an industrial calibration facility

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 523-526

  Hinkle, L D ^a   Uttaro, F L ^a  

^a MKS Instruments   (United States)

Author keywords

Mass flow calibration; Metrology; Pressure calibration; Standards

Indexed keywords

CALCULATIONS; CALIBRATION; FLOW OF FLUIDS; GAS METERS; MANUFACTURE; MASS TRANSFER; PRESSURE MEASUREMENT; STANDARDS; VACUUM TECHNOLOGY;

GAS FLOW INSTRUMENTATION; MASS FLOW CALIBRATION; NATIONAL STANDARDS LABORATORIES; TRANSFER STANDARDS; VACUUM GAUGING; VACUUM PROCESSING;

VACUUM GAGES;

EID: 0030168616     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00012-7     Document Type: Article

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