Control of discharge conditions to reduce hydrogen content in boron films coating

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 997-999

  Natsir, M ^a   Sagara, A ^b   Tsuzuki, K ^a   Tsuchiya, B ^c   Hasegawa, Y ^c   Motojima, O ^b  

^a GRADUATE UNIVERSITY FOR ADVANCED STUDIES   (Japan)

^b NATIONAL INSTITUTE FOR FUSION SCIENCE   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; BORON; CATHODES; ELECTRIC VARIABLES CONTROL; FILM GROWTH; GASES; GLOW DISCHARGES; HYDROGEN; PLASMA APPLICATIONS; PRESSURE EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

BORON FILMS COATING; DIBORANE GASES; DISCHARGE CONTROL; ELASTIC RECOIL DETECTION METHOD; ENERGETIC IONS; FLASH FILAMENT DESORPTION METHOD; HYDROGEN CONCENTRATION; HYDROGEN CONTENT; PLASMA PROCESSING TESTSTAND;

FILM PREPARATION;

EID: 0030168607     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00110-8     Document Type: Article

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