Inelastic collisions of Ne atoms and ions with a Si surface and effects of initial stages of oxidation

Surface Science

Volumn 356, Issue 1-3, 1996, Pages 92-100

  Guillemot, L ^a   Lacombe, S ^a   Maazouz, M ^a   Sanchez, E ^b   Esaulov, V A ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b CENTRO ATÓMICO BARILOCHE   (Argentina)

Author keywords

Amorphous surfaces; Atom solid interactions; Atom solid scattering and diffraction inelastic; Electron emission; Ion solid interactions; Medium energy ion scattering (MEIS); Noble gases; Secondary electron emission; Silicon; Single crystal surfaces

Indexed keywords

ATOMS; ELECTRON EMISSION; ELECTRON SPECTROSCOPY; GAS ADSORPTION; IONS; NEON; OXIDATION; OXYGEN; SILICON; SINGLE CRYSTALS; SURFACES;

ANGLE RESOLVED ION FRACTION MEASUREMENTS; AUTOIONISING STATES; INELASTIC COLLISIONS; OXYGEN ADSORPTION;

SURFACE PHENOMENA;

EID: 0030168146     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(96)00025-8     Document Type: Article

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