Low energy ion beam irradiation of silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 113, Issue 1-4, 1996, Pages 205-208

  Nebiker, P W ^a   Dobeli M ^a   Muhle R ^a   Suter, M ^a   Vetterli, D ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; GOLD; ION BEAMS; ION BOMBARDMENT; ION SOURCES; LASER BEAM EFFECTS; LIGHT REFLECTION; LIQUID METALS; OPTICAL VARIABLES MEASUREMENT; SINGLE CRYSTALS;

DEFECT PRODUCTION; GOLD CLUSTERS; LOW ENERGY ION BEAM IRRADIATION; MODULATED REFLECTIVITY; MONOCRYSTALLINE SILICON;

SILICON;

EID: 0030166762     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01366-0     Document Type: Article

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