Large area ion and plasma beam sources

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 113, Issue 1-4, 1996, Pages 8-15

  Waldorf, J ^a  

^a IPT Ionen und Plasmatechnik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; BEAM PLASMA INTERACTIONS; COPPER; CURRENT DENSITY; DEPOSITION; ELECTRON CYCLOTRON RESONANCE; ION BEAMS; ION SOURCES; PARTICLE BEAM EXTRACTION; PLASMA SOURCES; PLASMAS; THIN FILMS;

HIGH ION CURRENT DENSITY; ION BEAM ASSISTED DEPOSITION; LOW ION ENERGIES; PLASMA BEAM DEPOSITION; PLASMA BEAM EXTRACTION; PLASMA EXCITATION; REACTIVE GASES;

ELEMENTARY PARTICLE SOURCES;

EID: 0030166163     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01359-8     Document Type: Article

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