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Volumn 47, Issue 6-8, 1996, Pages 469-1033

Proceedings of the 1995 13th International Vacuum Congress and 9th International Conference on Solid Surfaces
[No Author Info available]

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEGASSING; FLOW OF FLUIDS; METALLURGY; MICROMACHINING; PARTICLE ACCELERATORS; PLASMA APPLICATIONS; PLASMA INTERACTIONS; PRESSURE MEASUREMENT; PUMPS; RARE EARTH ELEMENTS; SURFACE TREATMENT;

EID: 0030165959     PISSN: 0042207X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/0042-207X(96)00003-6     Document Type: Conference Review
Times cited : (2)

References (19)
  • 3
    • 0002209229 scopus 로고
    • Encapsulated micro mechanical sensors
    • M Esashi Encapsulated micro mechanical sensors Microsystem Technol 1 1994 2
    • (1994) Microsystem Technol , vol.1 , pp. 2
    • Esashi, M1
  • 7
    • 85114540298 scopus 로고
    • J Choi K Minami M Esashi 3rd ed. Technical Digest of the 13 th Sensor Symp A5-2 1995 Tokyo
    • (1995)
    • Choi, J1    Minami, K2    Esashi, M3
  • 14
  • 16
    • 0027647067 scopus 로고
    • Differencial output type microflow sensor
    • M Esashi H Kawai K Yoshimi Differencial output type microflow sensor 3rd ed. Electronics and Communications in Japan 76 1993 83 Part 2
    • (1993) , pp. 83
    • Esashi, M1    Kawai, H2    Yoshimi, K3
  • 17


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.