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Volumn 47, Issue 6-8, 1996, Pages 469-1033
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Proceedings of the 1995 13th International Vacuum Congress and 9th International Conference on Solid Surfaces
[No Author Info available]
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Author keywords
[No Author keywords available]
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Indexed keywords
COATINGS;
DEGASSING;
FLOW OF FLUIDS;
METALLURGY;
MICROMACHINING;
PARTICLE ACCELERATORS;
PLASMA APPLICATIONS;
PLASMA INTERACTIONS;
PRESSURE MEASUREMENT;
PUMPS;
RARE EARTH ELEMENTS;
SURFACE TREATMENT;
EIREV;
ELECTRON STIMULATED DESORPTION;
GAS FLOW STANDARD APPARATUS;
GLOW DISCHARGE CLEANING;
OUTGASSING;
VACUUM MELTING;
WALL CONDITIONING;
VACUUM TECHNOLOGY;
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EID: 0030165959
PISSN: 0042207X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1016/0042-207X(96)00003-6 Document Type: Conference Review |
Times cited : (2)
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References (19)
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