Measurement of hydrocarbon ions generated by plasma-wall interaction using a cyclotron resonance mass spectrometer

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 951-953

  Mieno, T ^a   Takeda, H ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Cyclotron resonance mass spectrometer; Generation of hydrocarbon ions; In situ measurement of impurity ions; Nuclear fusion; Plasma wall interaction

Indexed keywords

CARBON; DIFFUSION; ELECTRON CYCLOTRON RESONANCE; FUSION REACTIONS; HYDROGEN; IONS; MASS SPECTROMETERS; PLASMA DENSITY; PLASMA ETCHING; PLASMAS;

CARBON TEMPERATURE; CYCLOTRON RESONANCE MASS SPECTROMETRY; HYDROCARBON IONS; ION INJECTION ENERGY; PLASMA WALL INTERACTION;

PLASMA INTERACTIONS;

EID: 0030165590     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00100-5     Document Type: Article

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