Polymer developed to be interlayer dielectric

Semiconductor International

Volumn 19, Issue 6, 1996, Pages

  Wary, John ^a   Olson, Roger ^a   Beach, William ^a  

^a Specialty Coating Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CURING; DEPOSITION; ELECTRIC PROPERTIES; MULTILAYERS; ORGANIC POLYMERS; PERMITTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; THERMAL STRESS; THICKNESS CONTROL; VACUUM APPLICATIONS;

CONFORMAL FILM; INTERLAYER DIELECTRIC; POLYMER RESEARCH; TEMPERATURE STRESS; VACUUM DEPOSITION; WAFER PROCESSING;

DIELECTRIC MATERIALS;

EID: 0030165369     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)