Theoretical study on the pumping mechanism of a dry scroll vacuum pump

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 815-818

  Su, Yu ^a   Sawada, Tadashi ^a   Takemoto, Jun Ichi ^b   Haga, Shuji ^b  

^a AKITA UNIVERSITY   (Japan)

^b Iwata Air Compressor Mfg Co Ltd   (Japan)

Author keywords

Dry pump; Molecule flow; Scroll type; Ultimate pressure; Viscous flow

Indexed keywords

FLOW OF FLUIDS; GASES; MOLECULES; NUMERICAL ANALYSIS; PERFORMANCE; PRESSURE; SEALANTS; VACUUM TECHNOLOGY; VISCOUS FLOW;

CLEARANCE; DRY SCROLL VACUUM PUMPS; GAS POCKETS; LEAK FLOW; MOLECULAR FLOW; PHASE DIFFERENCE; PRESSURE DISTRIBUTION; PUMPING MECHANISMS;

VACUUM PUMPS;

EID: 0030164878     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00073-5     Document Type: Article

References (4)

1. M Knudsen, Ann Phys, 8, 75 (1909).
2. V d'A Browne and J E A John, Vacuum, 20, 525 (1970).
3. T Sawada and M Nakamura, J Vacuum Society of Japan, 34, 311 (1991).
4. C Hayashi, Vacuum Technology, Kyoritsu-shuppan, 581 (1985) (in Japanese).