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Volumn 143, Issue 6, 1996, Pages 2048-2052
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Electrochemically reduced polycrystalline tin oxide thin films: Surface analysis and electroplated copper adhesion
a,b a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ADHESION;
ATOMIC FORCE MICROSCOPY;
COPPER;
ELECTROCHEMISTRY;
ELECTROPLATING;
ETCHING;
MORPHOLOGY;
POLYCRYSTALLINE MATERIALS;
SURFACE ROUGHNESS;
SURFACES;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
SURFACE MODIFICATION;
SURFACE SHEET RESISTANCE MEASUREMENTS;
TIN OXIDE;
X RAY REFLECTION;
THIN FILMS;
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EID: 0030164481
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1836947 Document Type: Article |
Times cited : (11)
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References (15)
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