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Volumn 47, Issue 6-8, 1996, Pages 727-731
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Pump-down characteristics of outgassed clean stainless steel vacuum chamber and surface analysis of the chamber wall
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Author keywords
316LSS chamber; Degassing; Electropolishing; Surface composition; XHV
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CHEMICAL BONDS;
CHROMIUM COMPOUNDS;
DESORPTION;
ELECTROLYTIC POLISHING;
HYDROGEN;
IRON COMPOUNDS;
OXIDES;
STAINLESS STEEL;
SURFACE STRUCTURE;
VACUUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
CRYOSORPTION PUMP;
PUMP DOWN CHARACTERISTICS;
THERMAL DESORPTION SPECTROSCOPY;
VACUUM CHAMBER;
DEGASSING;
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EID: 0030164223
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/0042-207x(96)00057-7 Document Type: Article |
Times cited : (5)
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References (16)
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